Semiconductor wafers, a device for recovering the liquid droplets to measure the impurities present on the surface of a substrate such as a liquid crystal board

摘要

PROBLEM TO BE SOLVED: To provide a substrate inspecting apparatus capable of improving further its measuring accuracy.;SOLUTION: Instead of a conventional substrate inspecting apparatus for moving a substrate while sticking a liquid drop on it for its inspection, the substrate inspecting apparatus has a substrate rotating appliance for so holding the substrate horizontally as to rotate it around a vertical rotating shaft, the recovery jig of a cylindrical member having its inner space capable of storing a liquid drop therein and provided with a through hole in its lower portion which makes its inner space communicate with its atmospheric space, and a driving appliance capable of moving horizontally the recovery jig while so holding the recovery jig as to contact with the surface of the substrate the liquid drop stored in its inner space and exposed to the through hole. Further, the recovery jig is so moved relatively to the substrate as not to extrude the liquid drop from the specific region of the surface of the substrate.;COPYRIGHT: (C)2005,JPO&NCIPI