Microstructure and a manufacturing method thereof with a functionalized surface by localized deposition of thin layer

摘要

Electromechanical microstructure with a first portion known as the (102) mechanical parts made of a first conductive material and a (1), whereas elastically having (2) the exposed surface and the thickness on the side electromechanical microstructure which includes a deformable zone (104), and with the first organic film having a thickness that is present on the entire surface (2) the exposed surfaces of the deformable zone (104) to the other side (4) structure in (1), The thickness of the membrane (4) of the first variation of 5% or more compared to the response (104) deformable zone of the bare elastic response (104) deformable zones with the first film (4) either a thickness not, or, the thickness of the membrane (4) of the first electromechanical microstructure is characterized by less than 10 times the thickness of the deformable zone (104).