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Manufacturing method of chip-shaped electronic component and manufacturing method of pseudo wafer used for manufacturing the same

机译:芯片状电子零件的制造方法以及用于制造该晶片状电子零件的伪晶片的制造方法

摘要

A method of manufacturing the semiconductor chips comprises the steps of: pasting on a substrate an adhesive sheet having a property to retain its adhesive strength prior to a processing, then lose its adhesive strength after the processing; fixing a plurality of non-defective bare chips on this adhesive sheet, with their Al electrode pad surfaces facing down; coating a resin on a whole area other than the Al electrode pad surfaces of the plurality of non-defective bare chips including interspaces therebetween; applying a predetermined process to the adhesive sheet to weaken its adhesive strength of the adhesive sheet; peeling off a pseudo wafer bonding non-defective bare chips; and dicing the plurality of non-defective bare chips into a discrete non-defective electronic part by cutting the pseudo wafer at a position of the resin between respective non-defective bare chips. IMAGE
机译:制造半导体芯片的方法包括以下步骤:在基板上粘贴具有在处理之前保持其粘合强度的性质的粘合片,然后在处理之后失去其粘合强度的步骤;将多个无缺陷的裸芯片固定在该粘合片上,并使它们的Al电极焊盘表面朝下;在多个无缺陷的裸芯片的Al电极焊盘表面以外的整个区域上包括它们之间的空间,涂覆树脂。对粘合片进行预定的处理以减弱其对粘合片的粘合强度;剥离伪晶片,以粘合无缺陷的裸芯片;通过在各个无缺陷裸芯片之间的树脂位置处切割伪晶片,将多个无缺陷裸芯片切成离散的无缺陷电子部件。 <图像>

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