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Manufacturing method of chip-shaped electronic component and manufacturing method of pseudo wafer used for manufacturing the same
Manufacturing method of chip-shaped electronic component and manufacturing method of pseudo wafer used for manufacturing the same
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机译:芯片状电子零件的制造方法以及用于制造该晶片状电子零件的伪晶片的制造方法
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摘要
A method of manufacturing the semiconductor chips comprises the steps of: pasting on a substrate an adhesive sheet having a property to retain its adhesive strength prior to a processing, then lose its adhesive strength after the processing; fixing a plurality of non-defective bare chips on this adhesive sheet, with their Al electrode pad surfaces facing down; coating a resin on a whole area other than the Al electrode pad surfaces of the plurality of non-defective bare chips including interspaces therebetween; applying a predetermined process to the adhesive sheet to weaken its adhesive strength of the adhesive sheet; peeling off a pseudo wafer bonding non-defective bare chips; and dicing the plurality of non-defective bare chips into a discrete non-defective electronic part by cutting the pseudo wafer at a position of the resin between respective non-defective bare chips. IMAGE
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