Component holding performance inspection method and inspection equipment

摘要

A parts holdability testing device for testing a parts holding device for its holdability, the device being capable of accurately examining whether the parts holdability is good or bad. By a negative pressure sensor communicating with the suction hole in an adsorption nozzle for measuring negative pressure are detected negative pressures at a plurality of time points (preferably three or more time points) different from a time point at which evacuation of the adsorption nozzle is started (S4). The detected negative pressure values are respectively compared with reference negative pressure values set at respective detection time points (S6), and these comparison results are synthetically judged to automatically make an adsorption nozzle parts holdability quality decision (S7) and make a causal factor estimate if the decision shows that the holdability is bad (S8-S12).