Defect inspection apparatus of the film production method of a film with a defect inspection system and a defect inspection method and birefringent characteristics

摘要

PROBLEM TO BE SOLVED: To provide an apparatus, a system and a method for inspecting film defects, whereby an optical defect inspection for the films to be inspected can be carried out simply and easily, and moreover, every optical defect generated during a manufacturing process can be accurately detected without being missed.;SOLUTION: There are provided a pair of polarizers arranged parallel to each other to both sides of a film face of the film to be inspected, an illumination light source for shedding light to the film to be inspected via one polarizer, a light-intercepting means for receiving the light which is shed by the illumination light source and passes the other polarizer, and a correction film which has double refraction characteristics nearly equal to double refraction characteristics of a part of the film to be inspected having no optical defects and has an arrangement direction set beforehand, according to the double refraction characteristics of the film to be inspected. The optical defect of the film to be inspected is inspected by obtaining luminance signals of the passing light by the light-receiving means.;COPYRIGHT: (C)2001,JPO