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In order that it is provided on the shirikonchitsu conversion film and the said shirikonchitsu conversion film which
In order that it is provided on the shirikonchitsu conversion film and the said shirikonchitsu conversion film which
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机译:为了将其设置在shirikonchitsu转换膜和上述shirikonchitsu转换膜上,
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摘要
PROBLEM TO BE SOLVED: To provide a semiconductor light-emitting device and its manufacturing method that use a ZnO-family compound semiconductor, are a vertical type that can take out an electrode from the upper and lower surfaces of a chip, having superior crystallinity of a semiconductor layer and high light emission efficiency, at the same time, which do not use a sapphire substrate, and are convenient in a manufacturing process and use. ;SOLUTION: A silicon nitride film 2 is provided on the surface of a silicon substrate 1, at least n-type and p-type layers 3 and 4 and 6 and 7 consisting of a ZnO-family compound semiconductor are provided on the silicon nitride film 2, and a semiconductor lamination part 11 is laminated, so that a light emission layer is formed. The silicon nitride film 2 is preferably subjected to heat treatment under atmosphere, where nitrogen as an ammonia gas exists for forming.;COPYRIGHT: (C)2001,JPO
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