The sulfate ion removal manner which features that sulfate ion removal manner, copper/cobalt plated liquid regenerative manner, the sulfate ion removal device and

摘要

PROBLEM TO BE SOLVED: To provide a method for removing sulfate ions where sulfate ions contained in a used copper/cobalt plating solution are effectively removed, and the updating frequency of the copper/cobalt plating solution can be reduced, to provide an apparatus for removing sulfate ions, to provide a method for regenerating a copper/cobalt plating solution, and to provide an apparatus for regenerating a copper/cobalt plating solution.;SOLUTION: A weakly basic anion exchange resin is added to a used copper/cobalt plating solution comprising sulfate ions, and the sulfate ions in the copper/cobalt plating solution and the weakly basic anion exchange resin are reacted in a reaction tank 31, thus the excessive sulfate ions are removed from the used copper/cobalt plating solution. Then, copper sulfate and/or cobalt sulfate and ammonia and/or boric acid are replenished by insufficient quantities, thus the copper/cobalt plating solution is regenerated.;COPYRIGHT: (C)2005,JPO&NCIPI