CNT (carbon nanotube) chip and a method of manufacturing the same, as well as the electron gun and a scanning probe microscope for probe

摘要

PPROBLEM TO BE SOLVED: To provide a CNT chip having excellent durability and reliability, a manufacturing method of fabricating the CNT chip with high work efficiency, and an electron gun and SPM stylet using the CNT chip. PSOLUTION: This CNT chip 10 includes a support 12 having an acute part 12b at the tip, at least the tip of which is formed of SiC; and at least one carbon nanotube 14 grown at the tip of the acute part 12b by the surface decomposition of a CNT generating part constituting the tip of the acute part 12b. The CNT chip 10 of this type is so constructed that at least the tip of the acute part is formed of SiC, and the support 12 having an extremely small surface 12d at the tip of the acute part 12b is manufactured of a base material 30, and it is obtained by the surface decomposition of the CNT generating part 12c constituting the tip of the acute part 12b. PCOPYRIGHT: (C)2004,JPO&NCIPI