Levelling method and the solid surface levelling device of the solid surface due to the gas cluster ion beam

摘要

The scratch which exists on the solid surface and the surface roughness which is similar to that are decreased with the lighting of the gas cluster ion beam. We assume that it is levelling method of the solid surface due to the gas cluster ion beam which includes the lighting process which irradiates the gas cluster ion beam vis-a-vis the solid surface this lighting process assume that the territory where among the solid surfaces the gas cluster ion beam is irradiated at least (spot), the process which makes the cluster collide from plural directions is included. As for cluster collision from the plural directions for spot, for example, it is possible to do with the lighting of the above-mentioned gas cluster ion beam which scattering direction of the cluster emits vis-a-vis the beam center.