Interaction force measuring method using atomic force microscope and atomic force microscope

摘要

The frequency shift. Delta. F obtained by FM-AFM can be expressed by a simple linear combination of. Delta.flr derived from the long-range interaction force and. Delta. FSR derived from the short-range interaction force. Therefore, the. Delta. F curve on the atomic defect of the sample surface and the. Delta. F curve on the target atom are measured only in a relatively short distance range (S1, S2), and a difference. Delta. F curve of both of them is obtained (S3). Since the difference. Delta. F curve is derived only from the short range interaction force, the f curve indicating the relationship between the force and the distance Z is obtained by applying a known conversion processing to the short-range interaction force on the target atom (S4). Since the distance range at the time of. Delta. F curve measurement can be narrowed, the measurement time can be shortened, and the conversion of. Delta. F curve. Fwdarw. F curve is performed once, so that the calculation time can be shortened. This results in shortening the time and the time required for the measurement of the. Delta. F curve, and improving the throughput and improving the throughput at the time of finding the short distance interaction force between the atom and the probe on the sample surface.