As in the nitrogen addition glass film and the production mannered null high vacuum

摘要

PROBLEM TO BE SOLVED: To provide a high refractive index difference and low loss nitrogen-added glass film and to provide a method for producing a waveguide using the same.;SOLUTION: The method comprises applying a high-frequency voltage between the upper electrode 16 and the lower electrode 17 in a reaction chamber 2 evacuated to a high vacuum, heating the upper and lower electrodes 16 and 17 to a specified temperature, introducing substrates 42 into the reaction chamber 2, setting them on the lower electrode 17, feeding a raw material gas formed by vaporizing a plurality of alcoholate liquid sources 3, 4, and 5 together with an N₂ gas 6 and an O₂ gas 7 mixed in a specified mixing ratio into the reaction chamber 2, and subjecting it to a heat decomposition reaction in a high vacuum in a plasma atmosphere to form a nitrogen-added glass film on the surface of each substrate 42.;COPYRIGHT: (C)2005,JPO&NCIPI