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PLASMA FLUID MODELING WITH TRANSIENT TO STOCHASTIC TRANSFORMATION
PLASMA FLUID MODELING WITH TRANSIENT TO STOCHASTIC TRANSFORMATION
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机译:过渡到随机转换的等离子流体建模
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摘要
The invention relates to the simulation method and apparatus used in plasma modeling. It includes a method to transform transient formulations of the phenomenological plasma model into a quasi-stochastic spatial formulation. Specifically, the invention aids in decreasing computational time for the modeling of plasma in a plasma processing system, particularly those involving two different time-based parameters. The invention is particularly described in connection with plasma simulations used for the optimization dual-frequency capacitively-coupled plasma etching systems.
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