首页>
外国专利>
Physical/Biochemical Sensor Using Piezoelectric Microcantilever And Manufacturing Method Thereof
Physical/Biochemical Sensor Using Piezoelectric Microcantilever And Manufacturing Method Thereof
展开▼
机译:利用压电微悬臂梁的物理/生化传感器及其制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention discloses a physical/biochemical sensor using a multisized piezoelectric microcantilever resonator array which enables to quantitatively and simultaneously analyze a mass loading effect and a surface stress change effect and a manufacturing method thereof. In the physical/biochemical sensor using the multisized piezoelectric microcantilever resonator array, a plurality of piezoelectric micro-cantilever resonators having different sizes is arrayed so as to quantitatively and discriminately analyze a surface stress change as well as a sensor surface mass change induced by an adsorbed sensing-target material occurring in a sensing process. Thus, the mass loading effect and the surface stress change effect can be quantitatively and simultaneously analyzed.
展开▼