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THERMALLY PROGRAMMABLE ANTI-REVERSE ENGINEERING INTERCONNECTS AND METHODS OF FABRICATING SAME
THERMALLY PROGRAMMABLE ANTI-REVERSE ENGINEERING INTERCONNECTS AND METHODS OF FABRICATING SAME
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机译:热编程的反工程互连和相同的制造方法
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摘要
An interconnect and method of making the interconnect. The method includes forming a dielectric layer on a substrate, the dielectric layer having a top surface and a bottom surface; forming a first wire and a second wire in the dielectric layer, the first wire separated from the second wire by a region of the dielectric layer; and forming metallic nanoparticles in or on the top surface of the dielectric layer between the first and second wires, the metallic nanoparticles capable of electrically connecting the first wire and the second wire only while the nanoparticles are heated to a temperature greater than room temperature and a voltage is applied between the first and second wires.
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