首页> 外国专利> MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME

MULTI-SCALE CANTILEVER STRUCTURES HAVING NANO SIZED HOLES AND METHOD OF PREPARING THE SAME

机译:具有纳米尺寸孔的多尺度悬臂梁结构及其制备方法

摘要

Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.
机译:提供了具有通过阳极氧化制备的纳米级孔的多尺度悬臂结构及其制备方法。使用阳极氧化和电抛光来制备多尺度悬臂结构,使得制造工艺简单并且制造成本低廉。另外,多尺度悬臂结构具有在内部具有多个纳米级孔的多孔结构,因此可以使悬臂结构的表面积最大化。因此,当悬臂结构用于传感器中时,传感器可以具有改善的灵敏度和选择性。

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