INERTIAL OR RESONATING SENSOR IN SURFACE TECHNOLOGY, WITH OUT OF PLANE DETECTION BY STRAIN GAUGE

摘要

The invention involves a surface type MEMS sensor, characterized by that fact that it has:a) a first zone in semi-conductor material, called thick zone, which has a first thickness forming at least one mobile mass,b) a second zone in semi-conductor material, forming at least a pivot link for the mobile mass in relation to a substrate, with the axis of the pivot link running parallel to the substrate plane,c) a third one, called thin zone, with a lesser thickness than that of the second zone forming at least a suspended type strain gauge for the detection of the movement of the mobile mass around the axis of the pivot link and with this third area: extending in a plane parallel to the substrate plane which does not contain the axis of the pivot link,extending in a plane perpendicular to the rotation axis of the pivot link,being linked to the mobile mass on one side and to the substrate on the other.