首页>
外国专利>
Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge
Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge
展开▼
机译:表面技术中的惯性或共振传感器,通过应变仪进行平面外检测
展开▼
页面导航
摘要
著录项
相似文献
摘要
A MEMS surface sensor, including: a substrate, a surface of which defines a substrate plane; a first zone having a first thickness, of which two surfaces form a first plane and a second plane parallel in relation to one another and to the substrate plane, first zone forming at least one mobile mass that moves in a direction out of the substrate plane; and a second zone, linked to a fixed zone of the substrate, the second zone forming at least a pivot link of the mobile mass in relation to said substrate, and having a thickness less or equal to that of the mobile mass and being linked to the mobile mass, an axis of the pivot link being between the first plane and the second plane, and parallel to the first plane and the second plane.
展开▼