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'All In One' Spring Process For Cost-Effective Spring Manufacturing And Spring Self-Alignment
'All In One' Spring Process For Cost-Effective Spring Manufacturing And Spring Self-Alignment
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机译:具有成本效益的弹簧制造和弹簧自对准的“多合一”弹簧工艺
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摘要
A method of forming spring structures using a single lithographic operation is described. In particular, a single lithographic operation both defines the spring area and also defines what areas of the spring will be uplifted. By eliminating a second lithographic operation to define a spring release area, processing costs for spring fabrication can be reduced.
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