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Method and Apparatus for Micromachines, Microstructures, Nanomachines and Nanostructures
Method and Apparatus for Micromachines, Microstructures, Nanomachines and Nanostructures
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机译:用于微机械,微结构,纳米机械和纳米结构的方法和装置
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摘要
Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.
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