Microfluidic System Comprising Microfluidic Pump, Mixer or Valve

摘要

A microfluidic system. The system comprises: (A) a microfluidics platform comprising: a compliant body having a microfluidic channel defined therein; an elongate chamber defined by a section of the microfluidic channel, the chamber having a membrane wall defining part of an outer surface of the body; and a plurality of compression members spaced apart along the membrane wall, each compression member being configured for pinching a respective part of the membrane wall against an opposed wall of the chamber; and (B) a MEMS integrated circuit bonded to the outer surface of the body, the MEMS integrated circuit comprising: a plurality of moveable fingers, each finger engaged with a respective compression member, each finger being configured to urge the respective compression member between a closed position in which the respective part of the membrane wall is sealingly pinched against the opposed wall, and an open position in which the respective part of the membrane wall is disengaged from the opposed wall; a plurality of thermal bend actuators, each associated with a respective finger for controlling movement of the respective finger, and control circuitry for controlling actuation of the actuators.