Bright-field/dark-field detector with integrated electron energy spectrometer

摘要

One embodiment relates to an electron beam apparatus including an electron beam column, an immersion objective lens, a Wien filter, a bright-field/dark-field detector, and an electron energy spectrometer. The bright-field/dark-field detector comprising an opening configured to pass through bright field secondary electrons and one or more detector segments around the opening configured to detect dark field secondary electrons. The electron energy spectrometer configured to detect the bright field secondary electrons passed through the opening and to measure an energy spectrum of the bright field secondary electrons. Other embodiments, aspects and features are also disclosed.