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METHOD OF CHECKING THE HERMETICITY OF A CLOSED CAVITY OF A MICROMETRIC COMPONENT AND MICROMETRIC COMPONENT FOR THE IMPLEMENTATION OF THE SAME
METHOD OF CHECKING THE HERMETICITY OF A CLOSED CAVITY OF A MICROMETRIC COMPONENT AND MICROMETRIC COMPONENT FOR THE IMPLEMENTATION OF THE SAME
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机译:检查微腔元件的封闭腔的热度的方法以及实现微腔元件的微腔元件的方法
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摘要
In order to check the hermeticity of a closed cavity of at least one micrometric components, said component includes a structure made over or in one portion of a substrates, a cap fixed to one zone of the substrate to protect the structure, and an indicator element whose optical or electrical properties change in the presence of a reactive fluid. The indicator element may be a copper layer for an optical check or a palladium resistor for an electrical check. The micrometric component is placed in a container which is then hermetically closed. This container is filled with a reactive fluid under pressure, which is oxygen for the optical check and hydrogen for the electrical check. The component in the container is subjected to a reactive fluid pressure higher than 10 bars for a determined time period, and to thermal (T100° C.) or optical (λ500 nm) activation. After this time period, an optical or electrical check of the indicator element determines the hermeticity of said cavity.
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