FREQUENCY-AGILE RF-POWER EXCITATION FOR DRIVING DIFFUSION-COOLED SEALED-OFF, RF-EXCITED GAS LASERS

摘要

A gas discharge laser includes a laser housing including a laser gas and an electrode-assembly for lighting a discharge in the laser gas. The electrode assembly has a first resonant frequency when the discharge is not lit and a second resonant frequency when the discharge is lit. RF power delivering circuitry of the laser includes an arrangement for determining and recording the two resonant frequencies. RF power is applied to the electrodes at the first recorded resonant frequency to facilitate lighting of the discharge, and thereafter at the second resonant frequency to light and sustain the discharge.