Sensor apparatus for detecting variations in a dynamic quantity while suppressing detection deviations that are caused by bending deformation of a sensor chip

摘要

A miniaturized sensor such as a micro-accelerometer includes a sensor chip having a sensor element mounted thereon, with the sensor element being oriented with its central axes passing through the corners of the sensor chip. The corners of the sensor element are thereby located substantially apart from the corners of the sensor chip, so that bending deformation which displaces corners of the sensor chip is substantially prevented from causing displacement of corners of the sensor element. Detection inaccuracy resulting from such displacement can thereby be prevented or reduced.