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RETICLE STORAGE POD (RSP) TRANSPORT SYSTEM UTILIZING FOUP ADAPTER PLATE
RETICLE STORAGE POD (RSP) TRANSPORT SYSTEM UTILIZING FOUP ADAPTER PLATE
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机译:利用FOUP适配器板的网版POD(RSP)运输系统
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摘要
A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
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