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System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
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机译：在椭圆偏振仪或类似系统中应用水平定向弧光灯的系统和方法
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摘要
Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, or the like systems.
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