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Method for smart dummy insertion to reduce run time and dummy count
Method for smart dummy insertion to reduce run time and dummy count
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机译:智能假人插入以减少运行时间和假人计数的方法
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摘要
A method involves providing a circuit pattern, generating a density report for the circuit pattern that identifies a feasible area for dummy insertion, simulating a planarization process with the density report and identifying a hot spot on the circuit pattern, inserting a virtual dummy pattern in the feasible area and adjusting the density report accordingly, and thereafter simulating the planarization process with the adjusted density until the hot spot is eliminated.
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