Pattern-forming method for manufacturing device having partitioning layer formed on foundation layer with preliminary partitioning and residue fragment formed by removing part of partitioning layer

摘要

A pattern-forming method includes forming a partitioning layer on a foundation layer; forming a partitioning from the partitioning layer by patterning; and ejecting droplets containing a pattern-forming material onto a pattern-forming area that is enclosed by the foundation layer and the partitioning to form a pattern on the foundation layer. The forming of the partitioning layer includes forming a preliminary partitioning on the foundation layer, the preliminary partitioning including the partitioning and a residue fragment of the partitioning layer that is in the pattern-forming area, and performing patterning on the foundation layer using the residue fragment as a mask, thereby forming an uneven surface on the foundation layer.