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Halftone mask and method for making pattern substrate using the halftone mask
Halftone mask and method for making pattern substrate using the halftone mask
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机译:半色调掩模以及使用该半色调掩模制造图案基板的方法
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摘要
A halftone mask includes translucent film patterns for forming a middle gradation area and light blocking film patterns disposed to an entire periphery of the translucent film patterns.
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