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Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
Detecting and classifying surface features or defects by controlling the angle of the illumination plane of incidence with respect to the feature or defect
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机译:通过控制入射光平面相对于特征或缺陷的角度来检测和分类表面特征或缺陷
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摘要
Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a single and dual multiple beam techniques. In one embodiment, this the invention uses a pair of orthogonally oriented white light beams, one in the radial and one in the circumferential direction. The scattered light from the radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.
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