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Planar layer of image sensor, method for manufacturing planer layer, and image sensor including planar layer
Planar layer of image sensor, method for manufacturing planer layer, and image sensor including planar layer
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机译:图像传感器的平面层,平面层的制造方法以及包括平面层的图像传感器
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摘要
An image sensor formed using a method for manufacturing a planar layer in a process for forming microlenses may be used in a complementary metal oxide semiconductor (CMOS) image sensor. Embodiments provide a planar layer that can improve the operation performance of an image sensor, a manufacturing method thereof, and the image sensor including the planar layer. Embodiments relate to a planar layer located under microlenses, the planar layer including valleys of patterns having a predetermined size, which may eliminate optical cross talk between adjacent pixels.
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