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System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters

机译：在椭偏仪和旋光仪中控制电磁辐射束强度的系统和方法

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摘要

An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).

机译：椭圆偏振仪或偏光计系统和方法，可通过应用控制（P 2 ）和光束（P）偏振器（可选地与介入和控制补偿器结合使用）来控制波长范围内电磁束的强度（ C）。 展开▼

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公开/公告号US7830512B2

专利类型

公开/公告日2010-11-09

原文格式PDF

申请/专利权人 GALEN L. PFEIFFER;MARTIN M. LIPHARDT;
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申请/专利号US20080075956

发明设计人 GALEN L. PFEIFFER;MARTIN M. LIPHARDT;
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申请日2008-03-14

分类号G01J4/00;

国家 US

入库时间 2022-08-21 18:48:52

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5. System and method for controlling the intensity of a beam of electromagnetic radiation in an ellipsometer and polarimeter [P] . 日本专利： JP5054127B2 . 2012-10-24

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