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System and method for controlling the intensity of a beam of electromagnetic radiation in an ellipsometer and polarimeter
System and method for controlling the intensity of a beam of electromagnetic radiation in an ellipsometer and polarimeter
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机译:在椭偏仪和旋光仪中控制电磁辐射束强度的系统和方法
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摘要
An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
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