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Microstructure, microreactor, micro heat exchanger and method for fabricating microstructure
Microstructure, microreactor, micro heat exchanger and method for fabricating microstructure
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机译:微结构,微反应器,微热交换器及其制造方法
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摘要
A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.
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