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Test pattern for analyzing delay characteristic of interconnection line and method for analyzing delay characteristic of interconnection line using the same
Test pattern for analyzing delay characteristic of interconnection line and method for analyzing delay characteristic of interconnection line using the same
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机译:用于分析互连线的延迟特性的测试图案和使用该图案的分析互连线的延迟特性的方法
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摘要
A test pattern for analyzing a delay characteristic of an interconnection line and a method of analyzing a delay characteristic of an interconnection line using the test pattern are provided. The test pattern for analyzing a delay characteristic of an interconnection line includes: a first metal line formed as a snake shaped structure having a plurality of concave-convex sections each having the same width; a second metal line having a comb shape formed on the same layer as the first metal line such that a plurality of teeth portions of the second metal line are respectively formed between the concave-convex sections at one side of the first metal line; and a third metal line having a comb shape formed on the same layer as the first metal line such that a plurality of teeth portions of the third metal line are respectively formed between the concave-convex sections at the other side of the first metal line.
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