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Optical switch using frequency-based addressing in a microelectromechanical systems array
Optical switch using frequency-based addressing in a microelectromechanical systems array
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机译:在微机电系统阵列中使用基于频率的寻址的光开关
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摘要
Embodiments of the present invention provide structures for microelectromechanical systems (MEMS) that can be sensed, activated, controlled or otherwise addressed or made to respond by the application of forcing functions. In particular, an optical shutter structure suitable for use in an optical switch arrangement is disclosed. In one embodiment, an optical shutter or switch can be scaled and/or arranged to form arbitrary switch, multiplexer and/or demultiplexer configurations. In another embodiment of the present invention, an optical switch can include: a shutter; and a flexure coupled to the shutter, whereupon a vibration transmitted to the flexure when in the presence of a resonant frequency causes the shutter to move across an opening for the passage of an optical signal.
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