METHOD AND SYSTEM FOR DEFECT DETECTION USING TRANSMISSIVE BRIGHT FIELD ILLUMINATION AND TRANSMISSIVE DARK FIELD ILLUMINATION

摘要

A method for defect detection using transmissive bright field and transmissive dark field illumination, the method includes: determining a relationship between at least one transmissive bright field illuminator (92) characteristic and at least one transmissive dark field illuminator (91) characteristic in response to at least one characteristic of each defect type out of multiple defect types that should be detected during a defect detection session and in response to at least one phenomenon to be ignored of during the defect detection session; setting the at least one transmissive bright field illuminator (92) characteristic and the at least one transmissive dark field illuminator (91) characteristic according to the determination; illuminating an at least partially transparent object by the transmissive dark field illuminator and by the transmissive bright field illuminator; detecting light that passes through the at least partially transparent object to provide detection signals, and processing the detected signals in order to detect defects.