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Gas sensor on base of vitreous chalcogenide semiconductors

机译:基于玻璃硫属化物半导体的气体传感器

摘要

the invention relates to semiconductor devices, in particular gas detectors and can be used for detection of toxic gas in the atmosphere.gas detector based on semiconductor halcogenici glassy contains a support insulator, on which are located a layer sensitive to gas consecutively in a semiconductor halcogenic vitreous base obtained by the method evaporarii in vacuum as2s3, as2se3 or their solutiilor solid, and two electro day.also sensitive to gas layer has a surface with a reliefata strict periodicity, executed in the form of network difractie by holographic method.
机译:本发明涉及半导体器件,特别是气体检测器,并且可以用于检测大气中的有毒气体。基于半导体致冷剂的玻璃的气体检测器包含支撑绝缘体,在半导体致冷剂中连续设置有对气体敏感的层。通过在真空中以as2s3,as2se3或它们的可溶固体蒸发的方法得到的玻璃状碱,以及两个电子日。对气体层也敏感的表面具有凹凸的严格周期性,通过全息方法以网状折断的形式执行。

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