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Gas sensor on base of vitreous chalcogenide semiconductors
Gas sensor on base of vitreous chalcogenide semiconductors
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机译:基于玻璃硫属化物半导体的气体传感器
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摘要
the invention relates to semiconductor devices, in particular gas detectors and can be used for detection of toxic gas in the atmosphere.gas detector based on semiconductor halcogenici glassy contains a support insulator, on which are located a layer sensitive to gas consecutively in a semiconductor halcogenic vitreous base obtained by the method evaporarii in vacuum as2s3, as2se3 or their solutiilor solid, and two electro day.also sensitive to gas layer has a surface with a reliefata strict periodicity, executed in the form of network difractie by holographic method.
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