A blue-violet-near-ultraviolet pin-photodiode with small dark current, high reliability and long lifetime. The pin-photodiode has a metallic n-electrode, a n-ZnSe single crystal substrate, an optionally added n-ZnSe buffer layer, an n-Zn1-x Mg x S y Se1-y layer, an i-Zn 1-x Mg x S y Se1-y layer, a p-Zn1-x Mg x S y Se1-y layer, a p-(ZnTe/ZnSe)m SLE, a p-ZnTe contact layer, an optionally provided antireflection film and a metallic p- electrode. A blue-violet-near-ultraviolet avalanche photodiode with small dark current, high reliability and long lifetime. The avalanche photodiode has a metallic n- electrode, a n-ZnSe single crystal substrate, an optionally added n-ZnSe buffer layer, an n-Zn1-x Mg x S y Se1-y layer, an i-Zn1-x Mg x S y Se1-y layer, a p-Zn1-x Mg x S y Se1-y layer, a p- (ZnTe/ZnSe)m SLE, a p-ZnTe contact layer, an optionally provided antireflection film and a metallic p- electrode. Upper sides of the layered structure are etched into a mesa-shape and coated with insulating films.
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机译：一种蓝紫色-近紫外线针型光电二极管，暗电流小，可靠性高，使用寿命长。 pin光电二极管具有金属n电极，n-ZnSe单晶衬底，可选添加的n-ZnSe缓冲层，n-Zn1-x Mg x S y Se1-y层，i-Zn 1-x Mg x S y Se1-y层，p-Zn1-x Mg x S y Se1-y层，p-（ZnTe / ZnSe）m SLE，p-ZnTe接触层，可选提供的减反射膜和金属p电极。一种蓝紫色-近紫外雪崩光电二极管，暗电流小，可靠性高，寿命长。雪崩光电二极管具有金属n电极，n-ZnSe单晶衬底，可选添加的n-ZnSe缓冲层，n-Zn1-x Mg x S y Se1-y层，i-Zn1-x Mg x S y Se1-y层，p-Zn1-x Mg x S y Se1-y层，p-（ZnTe / ZnSe）m SLE，p-ZnTe接触层，可选提供的减反射膜和金属p-电极。将分层结构的上侧蚀刻成台面形状，并涂上绝缘膜。
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