首页>
外国专利>
MICRODEVICE WITH MOVABLE MICROPLATFORM AND PROCESS FOR MAKING THEREOF
MICRODEVICE WITH MOVABLE MICROPLATFORM AND PROCESS FOR MAKING THEREOF
展开▼
机译:具有可移动微平台的微设备及其制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A process for making a microdevice that includes the steps of providing a base member and selectively electroforming a support member for supporting a microplatform with respect to the base member. The process also includes the steps of selectively electroforming the microplatform and forming a flexible hinge member for hingedly connecting the microplatform to the support member and allowing relative movement of the microplatform with respect to the support member. This microdevice, when compared to prior art devices, can have improved mechanical strength, rigidity, low deformation, and high planarity.
展开▼