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Microcantilever stress sensor for fluid analysis
Microcantilever stress sensor for fluid analysis
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机译:用于流体分析的微悬臂梁应力传感器
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摘要
This invention relates to a microcantilever stress sensor for detecting and quantifying low levels of contaminants in liquids and gases. The invention uses a chemical agent to impart chemical specificity to the microcantilever stress sensor. The microcantilever deflects when the chemical agent is replaced by a more strongly adsorbing chemical species. The magnitude of the deflection is then used as a measure of the quantity of contaminant present.
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