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MOVING BODY APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ASSEMBLING METHOD AND MAINTAINING METHOD FOR MOVING BODY APPARATUS, AND ADJUSTING METHOD, MAINTAINING METHOD, AND ASSEMBLING METHOD FOR EXPOSURE APPARATUS
MOVING BODY APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ASSEMBLING METHOD AND MAINTAINING METHOD FOR MOVING BODY APPARATUS, AND ADJUSTING METHOD, MAINTAINING METHOD, AND ASSEMBLING METHOD FOR EXPOSURE APPARATUS
A fine movement stage (21) is rockably supported on a dead weight cancelling apparatus (27) by a leveling apparatus (76). Rocking of the fine movement stage (21) is mechanically limited by a leveling lock apparatus (60) for pressing a roller provided to a leveling cup of the leveling apparatus (76), where the pressing of the roller is performed through a polyhedron member and an air cylinder by means of a pressing section provided to the fine movement stage (21). Rocking of the fine movement stage (21) is mechanically limited also by a jack stopper apparatus (100) bridged between the fine movement stage (21) and a Y coarse movement stage (23Y). Accordingly, the attitude of the rockably supported fine movement stage can be stabilized when a moving body apparatus is not being operated.
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