首页> 外国专利> PROCESS FOR SURFACE STRUCTURING OF PRODUCT HAVING A SOL-GEL LAYER, PRODUCT HAVING A STRUCTURED SOL-GEL LAYER

PROCESS FOR SURFACE STRUCTURING OF PRODUCT HAVING A SOL-GEL LAYER, PRODUCT HAVING A STRUCTURED SOL-GEL LAYER

机译:具有SOL-GEL层的产品的表面结构化过程,具有SOL-GEL层的产品的表面结构化过程

摘要

The present invention relates to a process for structuring a surface, that is to say for forming at least one array of features with a submillimetre-scale lateral characteristic dimension on a plane surface of a product comprising a substrate bearing at least one layer obtained by a sol-gel process, the structuring being carried out at high temperature on a hydrolysed sol layer based on alkoxide(s) and/or halide(s) of at least one metal chosen from Si, Ti, Zr, W, Sb, Hf, Ta, V, Mg, Al, Mn, Co, Ni, Sn, Zn, Ce with a non-reactive organic group, being carried out by contact with a structured mask and by optionally exerting a pressure, and being carried out in a temperature range suitable for a sufficient condensation threshold that ensures the thermal behaviour of the structuring, with a total structuring time less than or equal to 2 hours. The invention also relates to the product thus obtained.
机译:本发明涉及一种结构化表面的方法,也就是说,用于在产品的平面上形成至少一个具有亚毫米级横向特征尺寸的特征阵列,该产品包括具有至少一层由基底获得的基底,该基底通过以下方法获得:溶胶-凝胶法,所述结构化是在基于至少一种选自以下的金属的醇盐和/或卤化物的水解的溶胶层上高温进行的:Si,Ti,Zr,W,Sb,Hf,具有非反应性有机基团的Ta,V,Mg,Al,Mn,Co,Ni,Sn,Zn,Ce通过与结构化掩模接触并任选施加压力来进行,并在一定温度下进行该范围适合于足够的凝结阈值,以确保结构的热行为,且总结构时间小于或等于2小时。本发明还涉及由此获得的产品。

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