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LAYERS COMPOSITE COMPRISING A PYROGENIC ZINC OXIDE LAYER AND FIELD-EFFECT TRANSISTOR COMPRISING THIS COMPOSITE
LAYERS COMPOSITE COMPRISING A PYROGENIC ZINC OXIDE LAYER AND FIELD-EFFECT TRANSISTOR COMPRISING THIS COMPOSITE
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机译:包含热解氧化锌层的复合层和包含该复合层的场效应晶体管
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摘要
Layered composite comprising the layer of dielectric layer and containing pyrogenic zinc oxide and being bonded to dielectric layer. The method for producing layered composite, whereinPyrogenic zinc oxide is applied to dielectric layer dispersion, wherein Zinc oxide particles, which exist, has mean aggregate diameter less than 200 nanometers, and the dry zinc oxide film, then handles in temperature less than 200 °C. The method for producing layered composite, whereinPyrogenic zinc oxide is applied to basal layer or composite substrate layers dispersion, wherein Zinc oxide particles, which exist, has layer of the mean aggregate diameter less than 200 nanometers, then zinc oxide is formed, the layer and substrate layer of zinc oxide are handled, in temperature less than 200 °C, dielectric layer is then applied to zinc oxide film. Field effect transistor has composite layer.
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