PARALLEL DISPLACEMENT MECHANISM AND METHOD FOR MANUFACTURING PARALLEL DISPLACEMENT MECHANISM

摘要

Provided is a parallel displacement mechanism wherein a displacement section, which is formed by laminating a first layer on the upper surface of an intermediate layer and laminating a second layer on the lower surface of the intermediate layer, is connected to a supporting section formed in the same manner, by means of a first beam formed of the first layer and a second beam formed of the second layer. The displacement section is configured to be displaced in parallel in the laminating direction of the first layer, the intermediate layer and the second layer. Thus, in the parallel displacement mechanism, tilts and positional shifts of an optical component can be suppressed, a fine and highly accurate parallel displacement can be made, and a large displacement can be obtained with a small drive power. A method for manufacturing the parallel displacement mechanism is also provided.