SURFACE-TREATMENT METHOD FOR COMPONENTS OF MECHANICAL BOOSTER PUMPS, TURBOMOLECULAR PUMPS, OR DRY PUMPS, AS WELL AS MECHANICAL BOOSTER PUMP, TURBOMOLECULAR PUMP, OR DRY PUMP TREATED WITH SAID SURFACE-TREATMENT METHOD

摘要

Provided is a surface-treatment method for components of mechanical booster pumps, turbomolecular pumps, or dry pumps, said method resulting in high resistance to corrosion and low outgassing. Also provided is a dry pump treated with said surface-treatment method. Components of mechanical booster pumps, turbomolecular pumps, or dry pumps comprise aluminum or aluminum alloy, and the surfaces of said components are immersed in an alkaline solution and treated with micro-arc oxidation.