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PROBE CARD WITH A REWIRING PROBE STRUCTURE AND A PROBE CARD MODULE USING THE SAME, CAPABLE OF REDUCING A TEST TIME AND A COST
PROBE CARD WITH A REWIRING PROBE STRUCTURE AND A PROBE CARD MODULE USING THE SAME, CAPABLE OF REDUCING A TEST TIME AND A COST
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机译：具有可重复使用的探针结构的探针卡和使用该探针卡模块的探针卡模块，能够减少测试时间和成本
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摘要
PURPOSE: A probe card with a rewiring probe structure and a probe card module using the same are provided to test a silicon wafer according to the temperature history.;CONSTITUTION: A probe card(40) with a rewiring probe structure includes a wafer(24,30) for the probe card, a penetration via electrode, and a rewiring probe structure. A plurality of penetration via electrodes(26a,32) pass through the wafer for the probe card. A rewiring probe structure(26b) of the twisted cage type is connected to the penetration via electrodes and is protruded from the one side of the wafer for the probe card.;COPYRIGHT KIPO 2010
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