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METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND A METHOD OF MANUFACTURING DISPLAY SUBSTRATE USING THE SAME, CAPABLE OF PERFORMING A PLASMA PRE-TREATMENT PROCESS
METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND A METHOD OF MANUFACTURING DISPLAY SUBSTRATE USING THE SAME, CAPABLE OF PERFORMING A PLASMA PRE-TREATMENT PROCESS
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机译:处理钠钙玻璃基质的方法和使用相同方法制造显示基质的方法,能够执行等离子体预处理过程
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摘要
PURPOSE: A method of treating a SLG(Soda-Lime Glass) substrate and a method of manufacturing display substrate using the same are provided to reduce defect due to adherence foreign material of a SLG substrate by cleaning the SLG substrate with alkali cleaning solution.;CONSTITUTION: A method of treating a SLG substrate(101) comprises following steps. The SLG substrate is cleaned with alkali cleaning solution. The washed SLG substrate is washed through a plasma process. The alkali cleaning solution contains the alkali material of 1~25% concentration. The plasma process uses one among nitrogen gas, ammonia gas, and hydrogen gas.;COPYRIGHT KIPO 2010
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