首页> 外国专利> METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND A METHOD OF MANUFACTURING DISPLAY SUBSTRATE USING THE SAME, CAPABLE OF PERFORMING A PLASMA PRE-TREATMENT PROCESS

METHOD OF TREATING SODA-LIME GLASS SUBSTRATE AND A METHOD OF MANUFACTURING DISPLAY SUBSTRATE USING THE SAME, CAPABLE OF PERFORMING A PLASMA PRE-TREATMENT PROCESS

机译:处理钠钙玻璃基质的方法和使用相同方法制造显示基质的方法,能够执行等离子体预处理过程

摘要

PURPOSE: A method of treating a SLG(Soda-Lime Glass) substrate and a method of manufacturing display substrate using the same are provided to reduce defect due to adherence foreign material of a SLG substrate by cleaning the SLG substrate with alkali cleaning solution.;CONSTITUTION: A method of treating a SLG substrate(101) comprises following steps. The SLG substrate is cleaned with alkali cleaning solution. The washed SLG substrate is washed through a plasma process. The alkali cleaning solution contains the alkali material of 1~25% concentration. The plasma process uses one among nitrogen gas, ammonia gas, and hydrogen gas.;COPYRIGHT KIPO 2010
机译:用途:提供一种处理SLG(碱石灰玻璃)基板的方法和使用该基板的制造基板的方法,以通过用碱清洗液清洗SLG基板来减少由于SLG基板的粘附异物引起的缺陷。构成:一种处理SLG基底(101)的方法,包括以下步骤。用碱清洗液清洗SLG基板。清洗后的SLG基板通过等离子工艺清洗。碱清洗液中含有浓度为1〜25%的碱材料。等离子工艺使用氮气,氨气和氢气中的一种。; COPYRIGHT KIPO 2010

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号