AUTOMATIC MANUFACTURING FACILITY CAPABLE OF PERFORMING HIGH CLEANNESS

摘要

PURPOSE: An automatic manufacturing facility is provided to reduce a failure rate of a product by preventing attachment of a foreign material in an object during a manufacturing process.;CONSTITUTION: An automatic manufacturing facility includes a worktable and a robot arm unit. An object is loaded in the worktable(200). The robot arm unit(300) includes at least two or more tool arms in order to perform a manufacturing process in the worktable. The tool arms include a moving unit and a frame. The moving unit(312,322,332) is formed for relative movement. A chamber is formed in a space inside the frame(311,321,331) in order to surround an outer circumference of the moving unit. An exhaust unit(700) is mounted in at least one frame among the tool arms in order to exhaust a foreign material from the chamber.;COPYRIGHT KIPO 2010