CALIBRATION DEVICE OF A CONTACTLESS INSTRUMENTATION SYSTEM, CAPABLE OF PERFORMING THE CALIBRATION OF HIGH PRECISION

摘要

PURPOSE: A calibration device of a contactless instrumentation system is provided to obtain exact three dimensional information by measuring the alignment of a line beam emitted by a beam generator a moving shaft of a vibration stage transferring the calibration device.;CONSTITUTION: A calibration device of a contactless instrumentation system comprises a case(210) and a camera(220). An oblique side(211) and a rectangular side(213) are arranged on the case. The oblique side and the rectangular side have a shape which is extended by cutting a vertex from a V-shape. The camera is arranged inside the case. The camera takes a photograph of the laser beam image forming on the rectangular side of the line beam. The calibration device comprises a vibration stage transferring the case along a fixed route. The case has a trapezoid box type.;COPYRIGHT KIPO 2010